等離子刻蝕設(shè)備AW-901ER Plasma Etch RIE

完全代替Tegal 901E

設(shè)備廠家：Allwin21

設(shè)備型號(hào)：AW-901ER

晶圓尺寸：/3″/4″/5″/6″

適合材料：Si, GaAs , InP , GaN , SiC , GaInP , Glass ,

傳片系統(tǒng)：全自動(dòng), Allwin21自有技術(shù)，固態(tài)機(jī)械手傳片系統(tǒng)

等離子電源：600W Air-Cooled RF 13.56MHz

類型：晶圓水平放置/單片工藝,獨(dú)立機(jī)臺(tái)

主要應(yīng)用：

工藝氣體：

產(chǎn)品描述

	AW-901eR	AW-903eR
Applications	Silicon Nitride Plating Seed Layers Thin Film Resistors Photoresist Descum PRIST Polyimide	Polyimide Silicon Oxide Contact/Via Planarization
Pressure Range(mT)	0-1000	0-5000
Pressure Control	225 sccm UPC	2000 sccm UPC
MFC	50 sccm O2 60 sccm Argon 25 sccm CFCl3 100 sccm SF6	15 sccm N2 50 sccm CHF3 15 sccm SF6 200 sccm He
Upper Electrode	Gas inlet and outlet holes are contained in 1 piece 429 inlet holes(0.031 dia) 120 outlet holes(0.062 dia) Coolant flows around outside diameter Not anodized	Gas inlet and outlet holes are contained in separate pieces 593 inlet holes(0.008 to 0.016 dia) 60 outlet holes(0.130 dia) Coolant flows around outside and through showerhead Showerhead is anodized (exhaust ring is not)
Pins Length (Inches)	1.79	2.125
Water Recirculators	1	1 or 2
Wafer Ring	Aluminum	Ceramic (99.5% Alumina) Castillated
RF Cable to Chuck	Different Length (26.25″)	Different Length (16″)
Electrode Gap (mm)	38	6
Lower Electrode	Not Anodized, Not Flat Aligned	Anodized, Flat Aligned

上一產(chǎn)品：沒有了

下一產(chǎn)品：沒有了

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